二氧化碳发泡机

CO2 INJECTOR (CO2 BUBBLER)

CO2 INJECTOR (CO2 BUBBLER)
产品详情

恩乐科二氧化碳发泡机内嵌式,替代DISCO CO2 INJECTOR (CO2 BUBBLER) 、 ELK-15LS、ELK-15LS-PRO


High quality processing, contamination-free devices

COInline Injector (COBubbler) is designed to eliminate particle adhesion and device damage caused by electrostatic effects. The units dissolve CO2 gas into de-ionized water (DI) used for dicing or cleaning processes, thus performing consistent control over an optimal level of resistivity.

System Highlights:

  • 2 Line display, monitoring and alarms
  • Resistivity target and range setting
  • Resistivity / Conductivity units display
  • Dicing Communication (will be avaiable soon)

Technical Specifications:

Water capacity 3-10 liter/min
Set point range 0.5 MΩ – 1 MΩ
Line voltage 110/220 V 50 Hz or 60 Hz
Dimensions (WxHxD) 190 x 446 x 365mm
Aprox. weight 10 kg